Boron phosphide-based semiconductor device and production method thereof
AssigneeShowa Denko K.K.
InventorTakashi Udagawa
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Abstract
A boron phosphide-based semiconductor device includes a single crystal substrate having formed thereon a boron-phosphide (BP)-based semiconductor layer containing boron and phosphorus as constituent elements, where phosphorus (P) occupying the vacant lattice point (vacancy) of boron (B) and boron occupying the vacant lattice point (vacancy) of phosphorus are present in the boron-phosphide (BP)-based semiconductor layer. The boron phosphide-based semiconductor device includes a p-type boron phosphide-based semiconductor layer in which boron occupying the vacancy of phosphorus is contained in a higher atomic concentration than phosphorus occupying the vacancy of boron and a p-type impurity of Group II element or Group I V element is added.
Claims8
A boron phosphide-based semiconductor device including a single crystal substrate having formed thereon a boron-phosphide (BP)-based semiconductor layer containing boron and phosphorus as constituent elements, where phosphorus (P) occupying the vacant lattice point (vacancy) of boron (B) and boron occupying the vacant lattice point (vacancy) of phosphorus are present in the boron-phosphide (BP)-based semiconductor layer, the boron phosphide-based semiconductor device comprising:
- both a p-type boron phosphide-based semiconductor layer in which boron occupying the vacancy of phosphorus is contained in a higher atomic concentration than phosphorus occupying the vacancy of boron and a p-type impurity of Group II element is added, and an n-type boron phosphide-based semiconductor layer in which phosphorus occupying the vacancy of boron is contained in a higher atomic concentration than boron occupying the vacancy of phosphorus and an n-type impurity of Group IV element is added,
- wherein the Group II element added as a p-type impurity is at least one element selected from the group consisting of zinc (Zn), cadmium (Cd) and mercury (Hg), and the Group IV element added as an n-type impurity is tin (Sn).
A method for producing a boron phosphide-based semiconductor device including a single crystal substrate having formed thereon a boron-phosphide (BP)-based semiconductor layer containing boron and phosphorus as constituent elements, where phosphorus (P) occupying the vacant lattice point (vacancy) of boron (B) and boron occupying the vacant lattice point (vacancy) of phosphorus are present in the boron-phosphide (BP)-based semiconductor layer, the boron phosphide-based semiconductor device comprising:
- both a p-type boron phosphide-based semiconductor layer in which boron occupying the vacancy of phosphorus is contained in a higher atomic concentration than phosphorus occupying the vacancy of boron and a p-type impurity of Group II element is added, and an n-type boron phosphide-based semiconductor layer in which phosphorus occupying the vacancy of boron is contained in a higher atomic concentration than boron occupying the vacancy of phosphorus and an n-type impurity of Group IV element is added,
- wherein the Group II element added as a p-type impurity is at least one element selected from the group consisting of zinc (Zn), cadmium (Cd) and mercury (Hg), and the Group IV element added as an n-type impurity is tin (Sn), comprising the step of:
- vapor-phase growing a p-type boron phosphide-based semiconductor layer on a single crystal substrate while setting the substrate temperature to a range between 1,000° C. to 1,200° C., adjusting the feed ratio of a source material for the boron constituent element to a source material for the phosphorus constituent element to a range from 70 to 150, and adding a source material for the p-type impurity of Group II element.
A method for producing a boron phosphide-based semiconductor device including a single crystal substrate having formed thereon a boron-phosphide (BP)-based semiconductor layer containing boron and phosphorus as constituent elements, where phosphorus (P) occupying the vacant lattice point (vacancy) of boron (B) and boron occupying the vacant lattice point (vacancy) of phosphorus are present in the boron-phosphide (BP)-based semiconductor layer, the boron phosphide-based semiconductor device comprising:
- both a p-type boron phosphide-based semiconductor layer in which boron occupying the vacancy of phosphorus is contained in a higher atomic concentration than phosphorus occupying the vacancy of boron and a p-type impurity of Group II element is added, and an n-type boron phosphide-based semiconductor layer in which phosphorus occupying the vacancy of boron is contained in a higher atomic concentration than boron occupying the vacancy of phosphorus and an n-type impurity of Group IV element is added,
- wherein the Group II element added as a p-type impurity is at least one element selected from the group consisting of zinc (Zn), cadmium (Cd) and mercury (Hg), and the Group IV element added as an n-type impurity is tin (Sn), comprising the step of:
- vapor-phase growing an n-type boron phosphide-based semiconductor layer on a single crystal substrate while setting the substrate temperature to a range 750° C. to 1,000° C., adjusting the feed ratio of a source material for the boron constituent element to a source material for the phosphorous constituent element to a range from 70 to 150, and adding a source material for the n-type impurity of Group IV element.
Dependencies are inferred from the claim text.