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US 7,018,707 B2Granted
Porous ceramic laminate and production thereof
AssigneesNoritake Co., Limited, Chubu Electric Power Co., Inc.
InventorsShigekazu Mase, Shigeo Nagaya, Junichiro Tsubaki, Kiyoshi Komura
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Abstract
A porous ceramic laminate has a porous silicon nitride substrate and a porous silicon nitride separation film supported thereon and having minute pores of sizes capable of Knudsen separation or molecular sieve by sintering a porous silicon nitride substrate supporting a formed layer containing polysilazane at 800° C. in a nitrogen atmosphere.
Claims39
A porous ceramic laminate comprising a porous ceramic separation membrane portion and a porous ceramic substrate supporting said separation membrane portion,
- said separation membrane portion and said substrate each comprising ceramics of Si and N, or Si and C as a main component, and
- said separation membrane portion comprising a plurality of pores, said pores having a pore size of 10 nm or less, wherein at least 70% of said pores have a pore size of 2 to 5 nm, which is small enough to obtain separation values equal to or greater than Kundsen separation.
Dependencies are inferred from the claim text.