Manufacturing methods and apparatuses of an optical device and a reflection plate provided with a resin thin film having a micro-asperity pattern

A method for manufacturing an optical device, comprising:

• coating a substrate with a resin thin layer, wherein temperature of the resin thin layer is controlled lower than a polymerization reaction starting temperature thereof and the resin is not substantially polymerized;
• heating the resin thin layer to a temperature higher than polymerization reaction starting temperature and glass-transition temperature but lower than a thermal decomposition starting temperature of the resin so that the resin thin layer is polymerized on the substrate to form a resin thin film thereon;
• pressing a stamp having an inverted micro-asperity pattern against the resin thin film such that a micro-asperity pattern is formed on a surface of the resin thin film, wherein the stamp is pressed against the resin thin film a plurality of times;
• cooling the resin thin film to a temperature lower than the glass-transition temperature;
• separating the stamp from the resin thin film;
• and
• baking an alignment film on the resin thin film at a temperature lower than the glass-transition temperature to prevent the micro-asperity pattern formed on the surface of the resin thin film from losing shape.