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US 7,018,598 B2Granted
Process for producing nitrogen trifluoride
AssigneeShowa Denko K.K.
InventorsHiromoto Ohno, Toshio Ohi
Life of this patent
Estimating the term…
Abstract
F2 gas is reacted with NH3 gas in a gaseous phase at 80° C. or less in the presence of a diluting gas to produce NF3. Thus, NF3 is produced with good safety, efficiency and profitability.
Claims8
A process for producing nitrogen trifluoride, comprising reacting fluorine gas with ammonia gas in a gaseous phase, wherein the reaction is performed at 70° C. or less in the presence of a diluting gas, wherein the concentration of fluorine gas fed is 3 mol % or less and the concentration of ammonia gas fed is 6 mol % or less,
- wherein at least the fluorine gas is fed in portions from two or more gas inlets or the ammonia gas is fed in portions from two or more gas inlets.
Dependencies are inferred from the claim text.