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US 7,018,556 B2Granted
Method to etch chrome deposited on calcium fluoride object
AssigneeASML Holding N.V.
InventorsNicholas A. DeLuca, Ronald P. Albright
Life of this patent
Estimating the term…
Abstract
A method for maintaining a micro-roughness finish after etching chrome from a surface of a calcium fluoride (CaF2) object. Etching the chrome a first amount in a first chrome etchant. Etching the chrome a second amount beyond the first predetermined amount in second chrome etchant, such that the CaF2 object maintains a low micro-roughness.
Claims10
A method comprising:
- etching chrome a first amount using a first chrome etchant;
- and
- etching the chrome a second amount beyond the first amount using a selective second chrome etchant that is a different etchant than the first chrome etchant.
Dependencies are inferred from the claim text.