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US 7,018,549 B2Granted
Method of fabricating multiple nanowires of uniform length from a single catalytic nanoparticle
AssigneeIntel Corporation
InventorsMatthew V. Metz, Scott A. Hareland, Robert S. Chau
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Abstract
A method is described for fabricating multiple nanowires of uniform length from a single precursor nucleation particle. The method includes growing a first nanowire segment from a nanoparticle and growing a second nanowire segment between the first nanowire segment and the nanoparticle. The first nanowire segment and the second nanowire segment have a different solubility.
Claims18
A method comprising:
- growing a first nanowire segment from a nanoparticle;
- growing a second nanowire segment between the first nanowire segment and the nanoparticle, wherein the first nanowire segment and the second nanowire segment have a different solubility;
- and
- sacrificing one of the first nanowire segment and the second nanowire segment.
1 more element
A method comprising:
- placing a plurality of nanoparticles on a substrate;
- exposing the nanoparticles to a first vapor precursor to grow first nanowire segments from the nanoparticles;
- exposing the nanoparticles to a second vapor precursor to grow second nanowire segments between the firs nanowire segments and the nanoparticles, wherein the first nanowire segments and the second nanowire segments comprise material having different solubility;
- and
- sacrificing one of the first nanowire segments and the second nanowire segments.
2 more elements
Dependencies are inferred from the claim text.