Apparatus and method for sensing defects in temperature sensors
AssigneeSamsung Electronics Co., Ltd.
InventorsKi-Hwan Park, Jong-Sub Hwang, Jeong-Hwan Kim
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AssigneeSamsung Electronics Co., Ltd.
InventorsKi-Hwan Park, Jong-Sub Hwang, Jeong-Hwan Kim
Estimating the term…
In a temperature controlling apparatus for controlling temperature by using a temperature sensor, a defect state of the temperature sensor is sensed by sensing a change of specific resistance of the temperature sensor. A temperature value of the temperature sensor is detected at each unit time during exchanging of a chemical solution or stopping of a process in a chamber of the semiconductor fabricating process. A lowest temperature among the detected temperature values and a reference temperature predetermined to sense the change of the specific resistance of the temperature sensor, are compared with each other. When the lowest temperature deviates from the reference temperature, a defect of the temperature sensor is confirmed and a message indicative of a defect state and an alarm are generated.
A method of sensing a defect of a temperature sensor adapted to measure a temperature of a chemical solution, comprising:
An apparatus for sensing a defect of a temperature sensor in a temperature controlling apparatus, the temperature sensor sensing a temperature of a chemical solution stored in a chemical bath, the apparatus comprising:
An apparatus for sensing a defect of a temperature sensor in a temperature controlling apparatus, the temperature sensor sensing a temperature of a chemical solution stored in a chemical bath, the apparatus comprising:
A method of sensing a defect of a temperature sensor, comprising:
A method of sensing a defect of a temperature sensor, comprising:
A method of sensing a defect of a temperature sensor, comprising:
Dependencies are inferred from the claim text.