US 7,018,017 B2Granted

Monolithic ink-jet printhead having a heater disposed between dual ink chambers and method for manufacturing the same

AssigneeSamsung Electronics Co., Ltd.

InventorsHoon Song, Yong-soo Oh, Jun-hyub Park, Keon Kuk, Chang-seung Lee, Young-jae Kim, Ji-hyuk Lim

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Abstract

A monolithic ink-jet printhead includes a substrate having a lower ink chamber formed on an upper surface thereof, a manifold for supplying ink to the lower ink chamber formed on a bottom surface thereof, and an ink channel providing communication therebetween; a nozzle plate having a plurality of passivation layers and a metal layer sequentially stacked on the substrate, the nozzle plate having an upper ink chamber formed therein on a bottom surface of the metal layer, a nozzle in communication with the upper ink chamber formed on an upper surface of the metal layer, and a connection hole providing communication between the upper ink chamber and the lower ink chamber; a heater located between the upper ink chamber and the lower ink chamber for heating ink contained in the lower and upper ink chambers; and a conductor electrically connected to the heater to apply a current to the heater.

Claims24

Dependent claims

A monolithic ink-jet printhead, comprising:

a substrate having a lower ink chamber to be supplied with ink formed on an upper surface thereof, a manifold for supplying ink to the lower ink chamber formed on a bottom surface thereof, and an ink channel, which perpendicularly penetrates the substrate for providing communication between the lower ink chamber and the manifold;
a nozzle plate having a plurality of passivation layers stacked on the substrate and a metal layer stacked on the passivation layers, the nozzle plate having an upper ink chamber formed therein on a bottom surface of the metal layer, and a nozzle in communication with the upper ink chamber formed on an upper surface of the metal layer;
a heater provided between adjacent passivation layers of the plurality of passivation layers, the heater being located between the upper ink chamber and the lower ink chamber for heating ink contained in the lower and upper ink chambers;
a connection hole providing communication between the upper ink chamber and the lower ink chamber;
and
a conductor provided between adjacent passivation layers of the plurality of passivation layers, the conductor being electrically connected to the heater to apply a current to the heater.

3 more elements

Dependencies are inferred from the claim text.