Substrate and method of forming substrate for fluid ejection device
AssigneeHewlett-Packard Development Company, L.P.
InventorsMartha A. Truninger, Charles C. Haluzak, Michael Monroe
Life of this patent
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Abstract
A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, forming at least one hole in the mask layer, filling the trench and the at least one hole, forming a first portion of the opening in the substrate from the second side of the substrate to the mask layer, and forming a second portion of the opening in the substrate from the second side of the substrate through the at least one hole in the mask layer to the first side of the substrate.
Claims28
A substrate for a fluid ejection device, the substrate comprising:
- a first side having a trench formed therein;
- a second side opposite the first side;
- a mask layer formed within the trench of the first side, the mask layer having at least one hole formed therein;
- a fill material disposed within the trench of the first side over the mask layer;
- and
- an opening communicating with the first side and the second side,
- wherein a first portion of the opening extends from the second side to the mask layer and a second portion of the opening is defined in the mask layer and the fill material and extends through the at least one hole in the mask layer and the fill material to the first side.
A substrate for a fluid ejection device, the substrate comprising:
- a first side and a second side opposite the first side;
- an etch stop layer embedded within the substrate between the first side and the second side, the etch stop layer having at least one hole formed therein;
- a fill material disposed over the etch stop layer, the fill material defining the first side of the substrate;
- and
- an opening communicating with the first side and the second side of the substrate,
- wherein a first portion of the opening extends from the second side to the etch stop layer and a second portion of the opening is defined in the etch stop layer and the fill material and extends through the at least one hole in the etch stop layer and the fill material to the first side.
A fluid ejection device, comprising:
- a first side and a substantially opposing second side;
- an opening formed between the first side and the second side;
- a mask layer formed within the opening and having at least one aperture formed therein;
- and
- a fill material disposed over the mask layer,
- wherein a first portion of the opening extends from the second side to the mask layer and a second portion of the opening is defined in the mask layer and the fill material and extends through the at least one aperture in the mask layer and the fill material to the first side.
Dependencies are inferred from the claim text.