Microfluid ejection device having efficient logic and driver circuitry
AssigneeLexmark International, Inc.
InventorsJ. Glenn Edelen, George K. Parish, Kristi M. Rowe
Life of this patent
Estimating the term…
Abstract
A semiconductor substrate for a microfluid ejection head. The substrate includes a plurality of fluid ejection actuators disposed on the substrate. A plurality of driver transistors are disposed on the substrate for driving the plurality of fluid ejection actuators. Each of the driver transistors have an active area ranging from about 1000 to less than about 15,000 μm2. A plurality of logic circuits including at least one logic transistor are coupled to the driver transistors. The driver and logic transistors are provided by a high density array of MOS transistors wherein at least the logic transistors have a gate length of from about 0.1 to less than about 3 microns.
Claims30
A semiconductor substrate for a microfluid ejection head, the substrate comprising:
- a plurality of fluid ejection actuators disposed on the substrate;
- a plurality of driver transistors disposed on the substrate for driving the plurality of fluid ejection actuators, each of the driver transistors having an active area ranging from about 1000 to less than about 15,000 μm2;
- and
- a plurality of logic circuits comprising at least one logic transistor are coupled to the driver transistors,
- wherein each of the driver and logic transistors comprise a high density array of MOS transistors wherein at least the logic transistors have a gate length of from about 0.1 to less than about 3 microns.
A microfluid ejection cartridge for a microfluid ejection device comprising:
- a cartridge body having a fluid supply source and an ejection head attached to the cartridge body in fluid communication with the fluid supply source, the ejection head comprising:
- a semiconductor substrate having a plurality of fluid ejection actuators disposed on the substrate;
- a plurality of driver transistors disposed on the substrate for driving the plurality of fluid ejection actuators, each of the driver transistors having an active area width ranging from about 100 to less than about 400 microns;
- and
- a plurality of logic circuits comprising at least one logic transistor operatively coupled to the driver transistors,
- wherein each of the driver and logic transistors comprise a high density array of MOS transistors wherein at least the logic transistor has a gate length of from about 0.1 to less than about 3 microns;
- and
- a nozzle plate attached to the semiconductor substrate for ejecting fluid therefrom upon activation of the fluid ejection actuators.
A semiconductor substrate for an ink jet printhead, the substrate comprising:
- a plurality of heater resistors disposed on the substrate, the heater resistors having a protective layer comprising diamond like carbon with a thickness ranging from about 1000 to about 3000 Angstroms;
- a plurality of driver transistors disposed on the substrate for driving the plurality of fluid ejection actuators;
- and
- a plurality of logic circuits comprising at least one logic transistor are coupled to the driver transistors,
- wherein each of the driver and logic transistors comprise a high density array of MOS transistors wherein at least the logic transistors have a gate length of from about 0.1 to less than about 3 microns.
Dependencies are inferred from the claim text.