Thin plate storage container
AssigneeMiraial Co., Ltd.
InventorsChiaki Matsutori, Takaharu Oyama
Life of this patent
Estimating the term…
Abstract
A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container body. The supporting member includes a base plate portion, side plates extending from the base plate portion, and a handle on each side plate for lifting the container body. The thin plate supporting member has contacting portions to support the thin plates, supporting members which elastically support the contacting portions, and a base support bar to support the supporting portions. The tip end of each supporting portion contacts a support stage, and elastically supports the contacting portions from both sides.
Claims7
A thin plate storage container comprising:
- a container body with an interior for storing a plurality of thin plates in a clean condition, said container body including four side walls extending to a flange surrounding an opening for insertion and removal of the thin plates, said flange including four corner portions, four planar edge surfaces connecting and integral with the four corner portions and a shoulder portion spaced from said opening by said planar edge surfaces;
- lid support inserts on at least one of said planar edge surfaces, said lid support inserts each providing a narrow contact surface;
- a lid for closing and sealing the interior of the container;
- a plurality of lid edge inserts, each of said lid edge inserts covering only a portion of a peripheral edge of the lid and presenting a planar contact surface for contacting the narrow contact surface of one of said lid support inserts;
- and
- wherein said lid edge inserts and said lid support inserts are formed of materials which generate minimal dust when brought into frictional contact with each other.
Dependencies are inferred from the claim text.