System and method for manufacturing control

A real-time monitoring system for abnormal process or tool states, comprising:

• a data collection unit, collecting historical data for a plurality of processes or tools;
• a data analysis unit, coupled to the data collection unit, analyzing the historical data to obtain abnormal-state causes for the processes or tools, and designating control chart models according to the abnormal-state causes, thereby obtaining model parameters of the control chart models and linking settings therebetween, both stored in a database;
• a monitoring model creation unit, coupled to the data analysis unit, creating a real-time monitoring model according to the abnormal-state causes, the model parameters, and the linking settings, and generating a real-time monitoring interface by merging a plurality of the real-time monitoring models, wherein the real-time monitoring model is a complex and model-oriented Bull model;
• and
• a state monitoring unit, coupled to the monitoring model creating unit, displaying operating states of the processes or tools using the real-time monitoring interface according to real-time data or the historical data stored in the database.

A real-time monitoring interface for complex abnormal process or tool states, comprising:

• a monitoring region, displaying operating states of a plurality of process tools, comprising a plurality of real-time monitoring pages, wherein each monitoring page comprises a plurality of real-time monitoring models, and each real-time monitoring model is created by merging at least one control chart model;
• a abnormal state display region, displaying abnormal states;
• a state display region, displaying states of the real-time monitoring pages, indicating abnormal states in different colors;
• an information region, displaying fundamental information for one real-time monitoring model;
• and
• a model name display region, displaying information for one control chart model of one real-time monitoring model.