Lithographic apparatus, device manufacturing method and device manufactured thereby, control system

A lithographic projection apparatus, comprising:

• a radiation system configured to provide a beam of radiation;
• a support configured to support a patterning device, the patterning device configured to pattern the beam according to a desired pattern;
• a substrate table configured to hold a substrate;
• and
• a projection system configured to project the patterned beam onto a target portion of the substrate, wherein the radiation system comprises an illumination system configured to define an intensity distribution of the projection beam, the illumination system comprising a setting device configured to direct different pans of an incoming radiation beam into different directions to provide a desired angular intensity distribution of the beam at the patterning device, the setting device comprising a plurality of directing elements, each directing element configured to direct a pan of the incoming radiation beam, and an orientation of each directing element is set to direct the part of the incoming radiation beam into a desired direction, wherein the setting device comprises:
• a reflector plate configured to support reflectors;
• at least one resilient member associated with each reflector and configured to resiliently support each reflector on the reflector plate;
• at least one aperture in the reflector plate associated with each reflector;
• and
• a setting plate including at least one pin associated with each reflector, wherein the pins of the setting plate are insertable into the apertures of the reflector plate each at least one pin engaging its associated reflector to orient the associated reflector by rotation about two axes substantially perpendicular to the optical axis of the associated reflector.