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US 7,015,455 B2Granted
Near-field optical probe
AssigneeSeiko Instruments Inc.
InventorsYasuyuki Mitsuoka, Norio Chiba, Nobuyuki Kasama, Takashi Niwa, Kunio Nakajima
Life of this patent
Estimating the term…
Abstract
A near-field optical probe has a flat support member having opposed flat surfaces, and a tapered through-hole extends through the support member and terminates at one of the flat surfaces in a narrow aperture. A light collecting layer having a plurality of reflective surfaces is disposed on the support member for collecting and focusing light passing through the narrow aperture. An optical detector disposed above the light collecting layer detects light passing through the light collecting layer.
Claims4
An optical probe comprising:
- a flat support member having opposed flat surfaces and a via hole with a tapered sidewall penetrating therethrough and terminating at one of the flat surfaces of the support member in a narrow aperture so that there is no projection in the vicinity of the narrow aperture;
- and a light detecting device disposed on the support member for collecting light passing through the narrow aperture, the light detecting device comprising a light collecting layer having a plurality of reflective surfaces for focusing light passing through the narrow aperture.
Dependencies are inferred from the claim text.