High conducting thin-film nanoprobe card and its fabrication method

A conducting thin-film nanoprobe card comprising:

• a ceramic substrate having a plurality of contacts located on a first side thereof, and a plurality of metal bumps located on a second side thereof and respectively electrically connected to said contacts;
• a conducting nanomembrane comprising a plurality of nanotubes or nanowires arranged in parallel subject to a predetermined pitch, and a highly insulated resin material;
• said conducting nanomembrane being mounted on the first side of said ceramic substrate such that a portion of said nanotubes or nanowires are respectively connected to said contacts of said ceramic substrate and the remaining said nanotubes or nanowires are not respectively connected to said contacts of said ceramic substrate;
• and
• a plurality of probes respectively formed of metal rods and respectively bonded to one side of said conducting nanomembrane opposite to said ceramic substrate corresponding to said contacts.