Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

A phased array antenna system comprising:

• a plurality of low-temperature co-fired ceramic (“LTCC”) modules integrated together, and
• at least one amplifier connected to the plurality of LTCC modules, each LTCC module being a radiating element and being comprised of:
• a first plurality of LTCC layers forming at least one first circuit used in the operation of the phased array antenna;
• a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna;
• at least one microelectromechanical (“MEMS”) device formed between the first and second pluralities of LTCC layers, the second plurality of LTCC layers being bonded to the first plurality of LTCC layers whereby the at least one MEMS device is enclosed between the first and second pluralities of LTCC layers;
• and
• at least one radiating patch formed on the second plurality of LTCC layers.

A phased array antenna system comprising:

• a plurality of sub-array modules formed on a low-temperature co-fired ceramic (“LTCC”) wafer, and
• at least one amplifier connected to the plurality of sub-array modules,
• each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including:
• a first module comprised of a first plurality of LTCC layers forming at least one first circuit used in the operation of the phased array antenna;
• a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna;
• at least one radiating patch formed on the second module;
• and
• at least one phase shifter fabricated from at least one microelectromechanical (“MEMS”) switch and formed between the first and second modules;
• and
• wherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules.

A phased array antenna system comprising:

• a plurality of sub-array modules integrated together to form the phased array antenna, each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including:
• a first module comprised of a first plurality of low-temperature co-fired ceramic (“LTCC”) layers forming at least one first circuit used in the operation of the phased array antenna;
• a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna;
• at least one radiating patch and at least one amplifier connected to the radiating patch formed on the second module;
• and
• at least one phase shifter fabricated from at least one microelectromechanical (“MEMS”) switch and formed between the first and second modules;
• and
• wherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules.

A phased array antenna system comprising:

• a plurality of sub-array modules integrated together to form the phased array antenna, and
• at least one amplifier connected to the plurality of sub-array modules,
• each of the sub-array modules being comprised of a plurality of radiating elements, each of the radiating elements including:
• at least a first module comprised of a first plurality of low-temperature co-fired ceramic (“LTCC”) layers forming at least one first circuit used in the operation of the phased array antenna;
• at least a second module comprised of a second plurality of LTCC layers forming at least a second circuit used in the operation of the phased-array antenna;
• at least one radiating patch formed on the second module;
• and
• at least one phase shifter fabricated from at least one microelectromechanical (“MEMS”) switch and formed between the first and second modules;
• and
• wherein the second module is bonded to the first module so as to enclose the at least one MEMS phase shifter between the first and second modules.