Compound, fluorine-containing polymerizable cyclic olefin compound
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakeru Watanabe, Takeshi Kinsho, Yuji Harada
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Abstract
There is disclosed a fluorine-containing polymerizable cyclic olefin compound that has one or more partial structures represented by the following general formula (1) or (2). There can be provided a novel fluorine-containing polymerizable cyclic olefin compound which is excellent in transparency to irradiation, for example, at a wavelength of 200 nm or less, especially at a wavelength of 160 nm or less and dry etching resistance, has low hydrophobicity, and is excellent in development characteristics, and thus is useful as a raw material for a base resin of photoresist composition
Claims5
A fluorine-containing polymerizable cyclic olefin compound that has one or more partial structures represented by the following general formula (1) or (2),
- ,wherein the compound is a fluorine-containing polymerizable cyclic olefin compound and R1 represents a hydrogen atom, or any one of a linear, branched or cyclic alkyl group, alkoxy group, acyloxy group, alkylthio group, acyl amino group, and alkyl sulfonyl amino group having 1–15 carbon atoms in which some or all of hydrogen atoms may be substituted with a halogen atom.
A manufacturing method of a fluorine-containing polymerizable cyclic olefin compound represented by the following general formula (3) or (4) wherein a cyclic olefin compound containing an aldehyde or a ketone represented by the following general formula (7) or (8) is reacted with metal 1,1,3,3,3-pentafluoro-2-propenyloxide compound,
- ,wherein R2 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1–10 carbon atoms in which some or all of hydrogen atoms may be substituted with a halogen atom, X represents a single bond or a linear, branched, or cyclic alkylene group having 1–10 carbon atoms in which some or all of hydrogen atoms may be substituted with a halogen atom, and n is 0 or 1.
A manufacturing method of a fluorine-containing polymerizable cyclic olefin compound represented by the following general formula (5) or (6) wherein a fluorine-containing polymerizable cyclic olefin compound represented by the following general formula (3) or (4) is reacted with a compound R1-Z,
- ,wherein R1 represents a hydrogen atom, or any one of a linear, branched or cyclic alkyl group, alkoxy group, acyloxy group, alkylthio group, acyl amino group and alkyl sulfonyl amino group having 1–15 carbon atoms in which some or all of hydrogen atoms may be substituted with a halogen atom, R2 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1–10 carbon atoms in which some or all of hydrogen atoms may be substituted with a halogen atom, X represents a single bond or a linear, branched, or cyclic alkylene group having 1–10 carbon atoms in which some or all of hydrogen atoms may be substituted with a halogen atom, Z represents a monovalent group such that R1-Z is R1 anion equivalent and n is 0 or 1.
Dependencies are inferred from the claim text.