Loading patent…
AssigneeCanon Kabushiki Kaisha
InventorsKoichi Sentoku, Hideki Ina, Takehiko Suzuki, Takahiro Matsumoto, Satoru Oishi
Estimating the term…
A system which manages a plurality of semiconductor exposure apparatuses holds TIS information representing the characteristics of the respective semiconductor exposure apparatuses. In a semiconductor exposure apparatus, a parameter value is optimized on the basis of AGA measurement results obtained using a set parameter value and another parameter value and AGA measurement estimation results obtained by virtually changing the parameter value. Whether to reflect the optimized parameter value in another exposure device is decided on the basis of the TIS information. If it is decided to reflect the optimized parameter value, the parameter value of another semiconductor exposure apparatus is optimized by the optimized parameter value. In this manner, the optimization result of a parameter value by a given exposure device can be properly reflected in another exposure device, realizing efficient parameter value setting.
A management apparatus for managing a plurality of exposure apparatuses, said management apparatus comprising:
A computer-implemented method of managing a plurality of exposure apparatuses, said method comprising steps of:
A computer-readable medium storing software for causing a computer to execute a method of managing a plurality of exposure apparatuses, said method comprising steps of:
A management apparatus for managing a plurality of exposure apparatuses, said management apparatus comprising:
Dependencies are inferred from the claim text.