Optical waveguide device, and method for fabricating the optical waveguide device
AssigneeFujitsu Limited
InventorsHidehiko Nakata, Satoshi Ide
Life of this patent
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Abstract
An optical waveguide device serving as a planar lightwave circuit, and an optical waveguide device which enables an attempt to realize greater functionality as a planar optical waveguide device. An optical waveguide device is configured to have a first cladding layer, a core formed on the first cladding layer for guiding light, and a second cladding layer formed on the first cladding layer and the core so as to surround the core, wherein the core comprises a trunk portion constituting a body of the core and a layered structure portion essentially perpendicular to a plane forming the first cladding layer.
Claims25
An optical waveguide device having a first cladding layer, a core formed on said first cladding layer for guiding light, and a second cladding layer formed on said first cladding layer and said core so as to surround said core, wherein:
- said core comprises a trunk portion constituting a body of said core, and a layered structure portion essentially perpendicular to a plane forming said first cladding layer;
- said trunk portion comprises a plurality of layers substantially horizontal to a plane forming said first cladding layer;
- adjacent layers in a plurality of layers forming said trunk portion are formed so as to differ in refractive index from each other;
- adjacent layers in a plurality of layers forming said trunk portion are formed such that refractive indices of said adjacent layers change stepwise;
- and
- a plurality of layers forming said trunk portion are formed such that a refractive index of a core layer of said core is made comparatively high and such that said refractive index is made smaller stepwise from said core section of said core toward an exterior layer and is again made larger.
An optical waveguide device having a first cladding layer, a core formed on said first cladding layer for guiding light, and a second cladding layer formed on said first cladding layer and said core so as to surround said core, wherein:
- said core comprises a trunk portion constituting a body of said core, and a layered structure portion essentially perpendicular to a plane forming said first cladding layer;
- said layered structure portion comprises a plurality of layers substantially perpendicular to a plane forming said first cladding layer;
- adjacent layers in a plurality of layers forming said layered structure portion are formed so as to differ in refractive index from each other;
- adjacent layers in a plurality of layers forming said layered structure portion are formed such that refractive indices of said adjacent layers change stepwise;
- and
- a plurality of layers forming said layered structure portion are formed such that a refractive index of a core layer of said core is made comparatively high and such that said refractive index is made smaller stepwise from said core section of said core toward an exterior layer and is again made larger.
An optical waveguide device having a first cladding layer, a core formed on said first cladding layer for guiding light, and a second cladding layer formed on said first cladding layer and said core so as to surround said core, wherein:
- said core comprises a trunk portion constituting a body of said core, and a layered structure portion essentially perpendicular to a plane forming said first cladding layer;
- a refractive index of said trunk or layered structure portion is continuously changed from a core section of said core toward the outside;
- and
- a distribution of refractive index in said trunk or layered structure portion is changed to a square distribution.
A method for fabricating an optical waveguide device comprising:
- forming a ridge-shaped trunk portion including a body of a core for guiding light, on an undercladding layer formed on a substrate or a substrate serving as said undercladding layer;
- forming a uniform thin film layer on said undercladding layer so as to cover the ridge-shaped trunk portion after said trunk portion has been formed, and subjecting a surface forming said undercladding layer to etching having vertical selectivity, thereby forming a substantially-vertical layered structure, which is to form said undercladding layer, on both longitudinal side surfaces of said trunk portion;
- and
- forming an overcladding layer after having performed said etching operation, to thus bury said core.
Dependencies are inferred from the claim text.