Light-beam switching/adjusting apparatus and manufacturing method thereof

A method for manufacturing a light beam switching and adjustment device, said method comprising:

• (i) preparing a light guide substrate which comprises:
• at least one input port,
• a plurality of output ports,
• at least one mirror receiving recess formed in one surface of the light guide substrate,
• a plurality of light guides that conduct light input into the at least one input port to a selected at least one output port of the plurality of output ports, and
• first alignment marks;
• (ii) preparing an actuator substrate which comprises:
• at least one mirror which is adapted to advance into and retract from a corresponding one said at least one mirror recess,
• at least one actuator disposed in a position corresponding to a corresponding one said at least one mirror to support the corresponding mirror, and
• second alignment marks,
• wherein the at least one actuator is operable to position the corresponding mirror in a first position in which the mirror is advanced into the corresponding mirror receiving recess and in a second position, which is closer to a surface of the actuator substrate than the first position, in which the mirror is retracted from the corresponding mirror receiving recess, and
• wherein the plurality of light guides conduct the light to the selected at least one output port in accordance with selective advancement and retraction of the at least one mirror with respect to the corresponding mirror receiving recess;
• and
• (iii) aligning and joining the light guide substrate and the actuator substrate using the first and second alignment marks to align the first and second alignment marks;
• wherein when the first alignment marks are aligned with the second alignment marks, the light guide substrate and the actuator substrate are aligned such that the at least one mirror is aligned with the corresponding at least one mirror receiving recess such that each said at least one mirror is able to advance into and retract from the corresponding one said at least one mirror recess.

A light beam switching and adjustment device comprising:

• (i) a light guide substrate which comprises:
• at least one input port,
• a plurality of output ports,
• at least one mirror receiving recess formed in one surface of the light guide substrate, and
• a plurality of light guides that conduct light input into the at least one input port to a selected at least one output port of the plurality of output ports;
• and
• (ii) an actuator substrate which comprises:
• at least one mirror which is adapted to advance into and retract from a corresponding one said at least one mirror recess, and
• at least one actuator disposed in a position corresponding to a corresponding one said at least one mirror to support the corresponding mirror,
• wherein the at least one actuator is operable to position the corresponding mirror in a first position in which the mirror is advanced into the corresponding mirror receiving recess and in a second position, which is closer to a surface of the actuator substrate than the first position, in which the mirror is retracted from the corresponding mirror receiving recess, and
• wherein the plurality of light guides conduct the light to the selected at least one output port in accordance with selective advancement and retraction of the at least one mirror with respect to the corresponding mirror receiving recess;
• (iii) first alignment marks formed on the light guide substrate for use in aligning the light guide substrate and the actuator substrate;
• and
• (iv) second alignment marks on the actuator substrate for use in aligning the light guide substrate and the actuator substrate;
• wherein the first alignment marks are formed on said surface of the light guide substrate, the second alignment marks are formed on said surface of the actuator substrate, and the actuator substrate permits transmission of infrared light therethrough.