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US 7,010,196 B2Granted
Method of forming laser induced grating pattern
AssigneeRiTdisplay Corporation
InventorJiann-Shuoh Liaw
Life of this patent
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Abstract
A method of forming a laser-induced grating comprising the steps of providing a substrate with a polished surface having a plurality of reflective regions thereon, providing a pulsed layer beam and focusing the beam on the substrate to produce a grating pattern on the substrate.
Claims22
A method of forming laser-induced grating pattern, comprising the steps of:
- providing a substrate with a polished surface having a plurality of reflective regions thereon;
- providing a pulsed laser beam that shines on the reflective regions on the substrate to produce a grating pattern through optical interference;
- and
- providing a cylindrical lens for adjusting the configuration of the grating pattern.
1 more element
A method of measuring the thickness of a thin film, comprising the steps of:
- providing a substrate with a polished surface having a plurality of reflective regions thereon;
- providing a pulsed laser beam that shines on the reflective regions on the substrate to produce a grating pattern through optical interference;
- providing a cylindrical lens positioned between the substrate and the thin film such that the configuration of the grating pattern can be adjusted through a shift in lens position;
- and
- finding the thickness of the film indirectly through taking measurement of the surface acoustic wave produced by the laser-induced grating pattern on the film.
2 more elements
Dependencies are inferred from the claim text.