Method and apparatus for reducing specular reflections in semiconductor lasers
AssigneeApplied Optoelectronics, Inc.
InventorsWen-Yen Hwang, Stefan J. Murry
Life of this patent
Estimating the term…
Abstract
The present invention is directed a method of fabricating a VCSEL. First, a substrate with a back surface and a front surface is provided. Then, a first reflector, an active region, and a second reflector are disposed on the front surface. The first reflector is disposed on the front surface. The active region is interposed between the first reflector and the second reflector. Then, anti-reflection features are formed into the back surface of the substrate to reduce specular reflection of light into the active region.
Claims14
A VCSEL comprising:
- a substrate having a back surface and a front surface;
- a first reflector disposed on the front surface of the substrate;
- an active region disposed on the first reflector;
- and
- a second reflector disposed on the active region such that the active region is interposed between the first reflector and the second reflector, wherein the back surface of the substrate comprises periodic row reflection means for causing a specular reflection of light impinging on said period row reflection means from the active region which specular reflection of light is directed away from said active region thereby reducing specular reflection of light into the active region.
An array of VCSELs sharing a common substrate, each VCSEL comprising:
- a substrate having a back surface and a front surface;
- a first reflector disposed on the front surface of the substrate;
- an active region disposed on the first reflector, and
- a second reflector disposed on the active region such that the active region is interposed between the first reflector and the second reflector, wherein the back surface of the substrate comprises periodic row reflection means for causing a specular reflection of light impinging on said period row reflection means from the active region which specular reflection of light is directed away from said active region thereby reducing specular reflection of light into the active region of each VCSEL.
Dependencies are inferred from the claim text.