High density metal-to-metal maze capacitor with optimized capacitance matching
AssigneeBroadcom Corporation
InventorsHenry KuoShun Chen, Akira Ito
Life of this patent
Estimating the term…
Abstract
A capacitor including a first and second component capacitor structure disposed on a substrate. A component capacitor structure includes an upright arm, a transverse arm, and a via. The upright arm has a top end and a bottom end that extend at substantially right angles to a central axis of the upright arm. The transverse arm has a left and right end that extend at substantially right angles to a central axis of the transverse arm. The upright arm and the transverse arm intersect to form a cross-like pattern and the top, bottom, left and right ends all extend in the same rotary direction. The via is electrically coupled to an area of intersection of the upright and transverse arms.
Claims15
A capacitor comprising a first and second component capacitor structure disposed on a substrate, each component capacitor structure comprising:
- an upright arm disposed on the substrate, the upright arm having a top end and a bottom end that extend at substantially right angles to a central axis of the upright arm;
- a transverse arm disposed on the substrate, the transverse arm having a left and right end that extend at substantially right angles to a central axis of the transverse arm, wherein the upright arm and the transverse arm intersect to form a cross-like pattern, and wherein the top, bottom, left and right ends all extend in the same rotary direction;
- and
- a via electrically coupled to an area of intersection of the upright and transverse arms.
A capacitor comprising a plurality of component capacitor structures disposed on a substrate, each component capacitor structure comprising:
- an upright arm disposed on the substrate, the upright arm having a top end and a bottom end that extend at substantially right angles to a central axis of the upright arm;
- a transverse arm disposed on the substrate, the transverse arm having a left and right end that extend at substantially right angles to a central axis of the transverse arm, wherein the upright arm and the transverse arm intersect to form a cross-like pattern and wherein the top, bottom, left and right ends all extend in the same rotary direction;
- and
- a via electrically coupled to an area of intersection of the upright and transverse arms.
A method for operating a capacitor wherein the capacitor comprises two component capacitor structures, each component capacitor structure comprising an upright arm disposed on a substrate, the upright arm having a top end and a bottom end that extend at substantially right angles to a central axis of the upright arm, a transverse arm disposed on the substrate, the transverse arm having a left and right end that extend at substantially right angles to a central axis of the transverse arm, wherein the upright arm and the transverse arm intersect to form a cross-like pattern and wherein the top, bottom, left and right ends all extend in the same rotary direction, and a via electrically coupled to an area of intersection of the upright and transverse arms, the method comprising:
- holding the via of the first component capacitor structure at a first voltage;
- and
- holding the via of the second component capacitor structure at a second voltage.
A method for operating a capacitor wherein the capacitor comprises a plurality of component capacitor structures, each component capacitor structure comprising an upright arm disposed on a substrate, the upright arm having a top end and a bottom end that extend at substantially right angles to a central axis of the upright arm, a transverse arm disposed on the substrate, the transverse arm having a left and right end that extend at substantially right angles to a central axis of the transverse arm, wherein the upright arm and the transverse arm intersect to form a cross-like pattern and wherein the top, bottom, left and right ends all extend in the same rotary direction, and a via electrically coupled to an area of intersection of the upright and transverse arms, the method comprising:
- holding the via of a first component capacitor structure in the plurality of component capacitor structures at a first voltage if the vias of component capacitor structures adjacent to the first component capacitor structure are held at a second voltage;
- and
- holding the via of a second component capacitor structure at a second voltage if the vias of the component capacitor structures adjacent to the second component capacitor structure are held at the first voltage.
Dependencies are inferred from the claim text.