Back to results
US 7,009,755 B2Granted
MEMS mirror with drive rotation amplification of mirror rotation angle
AssigneeAdvanced Nano Systems, Inc.
InventorYee-Chung Fu
Life of this patent
Estimating the term…
Abstract
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of rotational teeth extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.
Claims15
A micro-electro-mechanical system (MEMS) mirror device, comprising:
- a mirror;
- an actuator comprising a body and a plurality of rotational teeth extending from the body;
- a first torsional hinge coupling the mirror and a first end of the actuator along a rotational axis;
- an anchor;
- and
- a second torsional hinge coupling a second end of the actuator and the anchor along the rotational axis.
3 more elements
A method for operating a micro-electro-mechanical system (MEMS) mirror device, comprising:
- coupling a mirror and a first end of an actuator with a first torsional hinge along a rotational axis;
- coupling a second end of the actuator and an anchor with a second torsional hinge along the rotational axis;
- providing a first voltage to a plurality of rotational teeth extending from the actuator;
- providing a second voltage to a plurality of stationary teeth, the plurality of stationary teeth being interdigitated with the plurality of rotational teeth when the actuator is in a first position;
- wherein:
- an oscillating voltage difference between the plurality of rotational teeth and the plurality of stationary teeth oscillates the actuator about the rotational axis;
- and
- the first torsional hinge transfers a rotational motion of the actuator to the mirror so the mirror rotates at a different angle than the actuator.
5 more elements
Dependencies are inferred from the claim text.