Optical element and manufacturing method therefor
AssigneeSanyo Electric Co., Ltd.
InventorsDaisuke Ide, Koji Suzuki
Life of this patent
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Abstract
The cathode of an optical element, which is formed by a substrate, an anode formed on the substrate, a luminous element layer and a cathode, is made of aluminum whose surface orientation is substantially uniform. Oxygen content of the aluminum is substantially less or equal to 1×1020 atoms/cm3.
Claims18
An optical element, including at least:
- a substrate;
- a first electrode formed on said substrate;
- a luminous element layer formed on said first electrode;
- and
- a second electrode formed on said luminous element,
- wherein said second electrode is made of aluminum having substantially uniform surface orientation of (111).
An optical element, including at least:
- a substrate;
- a first electrode formed on said substrate;
- a luminous element layer formed on said first electrode;
- and
- a second electrode formed on said luminous element,
- wherein oxygen content in said second electrode is substantially 1×1020 atoms/cm3 or below at least in the vicinity of interface between said second electrode and said luminous element layer.
A method of manufacturing an optical element, the method including forming a second electrode by vapor depositing aluminum under a low-pressure atmosphere of substantially 1×10−4 Pa or below, over a substrate on which at least a first electrode and a luminous element layer are formed, wherein the vapor depositing is performed within a temperature range between substantially 20° C. to 40° C. both inclusive.
A method of manufacturing an optical element, the method including:
- forming a second electrode by vapor depositing aluminum under a low-pressure atmosphere of substantially 1×10−4 Pa or below, over a substrate on which at least a first electrode and a luminous element layer are formed;
- and
- forming a lithium fluoride layer over said luminous element layer, under the low-pressure atmosphere,
- wherein said second electrode is formed on said lithium fluoride layer without said substrate taking out of the low-pressure atmosphere, and
- wherein said lithium fluoride is formed in such a mariner that film thickness thereof is within a range of substantially 0.5 nm to 2 nm in said forming said lithium fluoride layer.
A method of manufacturing an optical element, the method including forming a second electrode by vapor depositing aluminum under a low-pressure atmosphere of substantially 1×10−4 Pa or below, over a substrate on which at least a first electrode and a luminous element layer are formed, to have said second electrode made of aluminum having substantially uniform surface orientation of (111).
A method of manufacturing an optical element, the method including forming a second electrode by vapor depositing aluminum under a low-pressure atmosphere of substantially 1×10−4 Pa or below, over a substrate on which at least a first electrode and a luminous element layer are formed, to have oxygen content in said second electrode substantially 1×1020 atoms/cm3 or below at least in the vicinity of interface between said second electrode and said luminous element layer.
An optical element, including at least:
- a substrate;
- a first electrode formed on said substrate;
- a luminous element layer formed on said first electrode;
- and
- a second electrode formed on said luminous element,
- wherein said second electrode is made of aluminum having at least 90% or more of a same surface orientation, as determined by an X-ray analyzing method.
Dependencies are inferred from the claim text.