Coating for optical MEMS devices
AssigneeTexas Instruments Incorporated
InventorsSeth A. Miller, Simon Joshua Jacobs
Life of this patent
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Abstract
A micromechanical device having a deflectable member which contacts a stationary member. An antireflective coating is applied to portions of the micromechanical device to limit undesired reflection from the device. A passivation or lubrication layer is applied to the device to reduce stiction between the deflectable member and the stationary member. An insulator layer is utilized between the antireflective coating and the lubrication layer to prevent photoelectric-induced breakdown of the lubrication layer.
Claims39
A method of forming a coating comprising:
- providing a substrate having a metal layer;
- applying an antireflective layer to said substrate layer;
- applying an insulator layer to said antireflective layer;
- and
- applying a lubrication layer to said insulator layer.
A micromechanical device comprising:
- a substrate;
- a reflective member supported on said substrate;
- an antireflective coating supported on said reflective member;
- an insulator layer supported on said antireflective coating;
- and
- a lubrication layer supported on said insulator layer.
A system comprising:
- a light source for providing a beam of light along a light path;
- and
- a device on said light path, said device comprising:
- a substrate;
- a reflective layer;
- an antireflective coating supported on said reflective layer;
- an insulation layer supported on said antireflective coating;
- and
- a lubrication layer on said insulation layer.
Dependencies are inferred from the claim text.