Optical probe for scanning the features of an object and methods therefor

An optical probe configured to measure the features of an object, comprising:

• at least one light source generating two or more patterns through one or more optics, wherein each pattern is projected in a different projection direction, wherein each projection direction projects a pattern that is a line pattern, and wherein the number of projection directions is two and each line pattern crosses the other orthogonally with a maximum deviation of about 20 degrees;
• two or more optics configured to accept the light returning from patterns projected on the object, each optic having a different viewing direction;
• and
• at least one detector configured to receive light returning through the optics.

A method of measuring the features of an object using an optical probe comprising more than one projection directions and more than one viewing directions, the method comprising:

• a) configuring the optical probe into three optical groups, wherein each optical group comprises at least one viewing direction and at least one projection direction, and wherein at least one viewing direction and at least one projection direction is different between the optical groups, wherein each optical group consists of one line pattern projected through one projection direction and viewed in at least one viewing direction, wherein the line patterns of the optical groups cross each other two by two at an angle of 120 degrees±about 20 degrees, and wherein data generated by the viewing directions is generated only from patterns projected by the projection directions of the same optical group;
• b) collecting data from each optical group while scanning the object;
• and
• c) obtaining a measurement of the features of the object based on the collected data.

A method of measuring the features of an object using an optical probe comprising more than one projection directions and more than one viewing directions, the method comprising:

• a) configuring the optical probe into four optical groups, wherein each optical group comprises at least one viewing direction and at least one projection direction, and wherein at least one viewing direction and at least one projection direction is different between the optical groups, wherein each optical group consists of one line pattern projected through one projection direction and viewed in at least one viewing direction, wherein each line pattern is parallel to one other line pattern with a maximum deviation of about 20 degrees, and orthogonal to the two other line patterns with a maximum deviation of about 20 degrees, and wherein data generated by the viewing directions is generated only from patterns projected by the projection directions of the same optical group;
• b) collecting data from each optical group while scanning the object;
• and
• c) obtaining a measurement of the features of the object based on the collected data.

An optical probe configured to measure the features of an object, comprising:

• at least one light source generating two or more patterns through one or more optics, wherein each pattern is projected in a different projection direction, wherein each projection direction projects a pattern that is a line pattern, wherein the number of projection directions is three and the line patterns cross each other, and wherein the angle between any two lines is 120 degrees±about 20 degrees;
• two or more optics configured to accept the light returning from patterns projected on the object, each optic having a different viewing direction;
• and
• at least one detector configured to receive light returning through the optics.

An optical probe configured to measure the features of an object, comprising:

• at least one light source generating two or more patterns through one or more optics, wherein each pattern is projected in a different projection direction, wherein each projection direction projects a pattern that is a line pattern, wherein the number of projection directions is four and each line pattern is parallel to one other line pattern with a maximum deviation of about 20 degrees, and orthogonal to the two other line patterns with a maximum deviation of about 20 degrees;
• two or more optics configured to accept the light returning from patterns projected on the object, each optic having a different viewing direction;
• and
• at least one detector configured to receive light returning through the optics.