Capacitance detection type sensor and manufacturing method thereof
AssigneeFujitsu Limited
InventorsMasaki Ito, Hideo Onodera, Shigeru Iwamoto
Life of this patent
Estimating the term…
Abstract
Capacitance sensor electrodes are arranged in a form of matrix on a semiconductor substrate and coated with a cover film. These capacitance sensor electrodes are connected to a drive circuit. ESD electrodes are arranged in the vicinities of corner portions of the capacitance sensor electrodes. Each ESD electrode is composed of a film containing, for example, aluminum excellent in conductivity and a TiN film formed thereon. The ESD electrodes are grounded through the semiconductor substrate. On each ESD electrode, a plurality of fine ESD holes reaching the ESD electrode from a surface of the cover film are formed.
Claims21
A capacitance detection type sensor provided with a plurality of capacitance sensor electrodes, comprising:
- a substrate;
- an insulating film formed on the substrate;
- a first electrostatic discharge electrode film conductive and formed on the insulating film;
- a second electrostatic discharge electrode film conductive and formed so as to be electrically connected to the first electrostatic discharge electrode film;
- and
- a cover film covering surfaces of the plurality of capacitance sensor electrodes and having a plurality of openings provided therein, the openings reaching the second electrostatic discharge electrode film.
A capacitance detection type sensor provided with a plurality of capacitance sensor electrodes, comprising:
- a substrate;
- a first insulating film formed on the substrate;
- a first electrostatic discharge electrode film conductive and formed on the first insulating film;
- a second insulating film formed on the first insulating film and the first electrostatic discharge electrode film;
- a second electrostatic discharge electrode film formed so as to be electrically connected to the first electrostatic discharge electrode film through a contact hole formed in the second insulating film;
- and
- a cover film covering surfaces of the plurality of capacitance sensor electrodes and having an opening provided therein, the opening reaching the second electrostatic discharge electrode film.
A capacitance detection type sensor provided with a plurality of capacitance sensor electrodes, comprising:
- a substrate;
- a first insulating film formed on the substrate;
- a first electrostatic discharge electrode film conductive and formed on the first insulating film;
- a second insulating film formed on the first insulating film and the first electrostatic discharge electrode film;
- a conductor plug formed in an opening of the second insulating film and electrically connected to the first electrostatic discharge electrode film;
- a second electrostatic discharge electrode film formed so as to be electrically connected to the conductor plug;
- and
- a cover film covering surfaces of the plurality of capacitance sensor electrodes and having an opening provided therein, the opening reaching the second electrostatic discharge electrode film.
Dependencies are inferred from the claim text.