Wafer probe station having environment control enclosure
AssigneeCascade Microtech, Inc.
InventorsWarren K. Harwood, Paul A. Tervo, Martin J. Koxxy
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Abstract
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
Claims8
A probe station comprising:
- (a) a chuck for supporting a test device;
- (b) at least one support for a probe to contact said test device;
- (c) an enclosure and an electrically conductive lower member having a substantially horizontal surface spaced vertically below said chuck, said enclosure defining an upper aperture for receiving said support and said electrically conductive lower member defining a lower aperture capable of relative lateral movement with respect to said upper aperture.
Dependencies are inferred from the claim text.