Ultrasonic vibration apparatus use as a sensor having a piezoelectric element mounted in a cylindrical casing and grooves filled with flexible filler
AssigneeMurata Manufacturing Co., Ltd.
InventorsKenji Matsuo, Junshi Ota
Life of this patent
Estimating the term…
Abstract
An ultrasonic vibration apparatus includes a casing having a vibration face, a piezoelectric element mounted in the casing, and a disk-like vibration plate supported at a position along a concentric circle differentiating two regions, an inner region and an outer region. In the ultrasonic vibration apparatus, the disk-like vibration plate is constructed so as to be a part of the casing serving as the vibration face, and, the piezoelectric element is mounted in the central part of the disk-like vibration plate, thereby causing the inner region and the outer region to vibrate in substantially the same phase.
Claims16
An ultrasonic vibration apparatus, comprising:
- a disk like vibration plate having a circular vibration surface, said vibration surface having an outer periphery;
- a support member coupled to said disk like vibration plate along a circular path located inside said outer periphery of said circular vibration surface so as to divide said vibration surface into inner and outer regions;
- a base member for the support member forming a chamber the disk-like vibration plate closing off one end of the chamber, the chamber being open at an opposite end, and
- a piezoelectric element coupled to a central region of said disk-like vibration plate inside the chamber to cause said inner and outer regions to vibrate in a resonance mode such that the inner and outer regions vibrate in substantially the same phase.
An ultrasonic vibration apparatus, comprising:
- a disk-like vibration plate having a circular vibration surface, said vibration surface having an outer periphery;
- a support member coupled to said disk-like vibration plate along a circular path located inside said outer periphery of said circular vibration surface so as to divide said vibration surface into inner and outer regions;
- and
- a piezoelectric element coupled to a central region of said disk-like vibration plate inside the chamber to cause said inner and outer regions to vibrate in a resonance mode such that the inner and outer regions vibrate in substantially the same phase;
- further comprising a cylindrical base member on which the support member is disposed, the support member and base member being disposed on the same side of the vibration plate, the disk-like vibration plate closing off one end of the chamber, the chamber being open at an opposite end.
An ultrasonic vibration apparatus, comprising:
- a disk-like vibration plate having a circular vibration surface, said vibration surface having an outer periphery;
- a support member coupled to said disk-like vibration plate along a circular path located inside said outer periphery of said circular vibration surface so as to divide said vibration surface into inner and outer regions;
- and
- a piezoelectric element coupled to a central region of said disk-like vibration plate to cause said inner and outer regions to vibrate in a resonance mode such that the inner and outer regions vibrate in substantially the same phase;
- a base member for said support member;
- further wherein the vibration plate is free from support in said outer region;
- further wherein said disk-like vibration plate, support member and base member are of integral construction.
Dependencies are inferred from the claim text.