Surface acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsHajime Kando, Michio Kadota
Life of this patent
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Abstract
A surface acoustic wave device using second leaky surface acoustic waves the dominant component of which is a longitudinal wave component includes a LiTaO3 substrate and a conductive film formed on the LiTaO3 substrate. The density ρ of the conductive film is in the range of about 2,699 kg/m3 to about 19,300 kg/m3.
Claims6
A surface acoustic wave device using second leaky surface acoustic waves having a dominant component which is a longitudinal wave component, the device comprising:
- a LiTaO3 substrate;
- and
- a conductive film disoosed on the LiTaO3 substrate;
- wherein
- the density ρ of the conductive film is in the range of about 2,699 kg/m3 to about 19.300 kg/m3;
- and
- the normalized thickness H/λ of the conductive film is within the range of about 5.3023×ρ−0.4172 to about 80161×ρ−1.781 wherein λ represents the wavelength of second leaky surface acoustic waves and H represents the thickness of the conductive film.
A surface acoustic wave device using second leaky surface acoustic waves the dominant component of which is a longitudinal wave component, the device comprising:
- a LiTaO3 substrate having an Euler angle within regions A1 to A10 defined by connecting the coordinates shown in Tables 1 and 2;
- and
- a conductive film disposed on the LiTaO3 substrate,
- wherein the density ρ of the conductive film is greater than about 2,699 kg/m3 and the normalized thickness H/λ of the conductive film is within the range of about 5.3023×ρ−0.4172 to about 80161×ρ−1.781 wherein λ represents the wavelength of the second leaky surface acoustic waves and H represents the thickness of the conductive film:
- TABLE 1
- Region
- Coordinates
- θ
- ψ
- A1
- P1
- 16.2
- 63.7
- P2
- 69.9
- 63.7
- P3
- 69.9
- 116.3
- P4
- 16.2
- 116.3
- P5
- 16.2
- 63.7
- A2
- P1
- 106.2
- 118.7
- P2
- 143.6
- 118.7
- P3
- 143.6
- 151.4
- P4
- 106.2
- 151.4
- P5
- 106.2
- 118.7
- A3
- P1
- 106.2
- 28.6
- P2
- 143.6
- 28.6
- P3
- 143.6
- 61.3
- P4
- 106.2
- 61.3
- P5
- 106.2
- 28.6
- A4
- P1
- 16.5
- 55.9
- P2
- 72.3
- 55.9
- P3
- 72.3
- 108.0
- P4
- 16.5
- 108.0
- P5
- 16.5
- 55.9
- A5
- P1
- 106.2
- 131.3
- P2
- 124.0
- 131.3
- P3
- 124.0
- 148.0
- P4
- 106.2
- 148.0
- P5
- 106.2
- 131.3
- TABLE 2
- Region
- Coordinates
- θ
- ψ
- A6
- P1
- 106.3
- 30.8
- P2
- 153.1
- 30.8
- P3
- 153.1
- 71.7
- P4
- 106.3
- 71.7
- P5
- 106.3
- 30.8
- A7
- P1
- 17.4
- 48.5
- P2
- 76.8
- 48.5
- P3
- 76.8
- 99.4
- P4
- 17.4
- 99.4
- P5
- 17.4
- 48.5
- A8
- P1
- 104.6
- 35.6
- P2
- 158.0
- 35.6
- P3
- 158.0
- 81.3
- P4
- 104.6
- 81.3
- P5
- 104.6
- 35.6
- A9
- P1
- 19.1
- 41.7
- P2
- 78.3
- 41.7
- P3
- 78.3
- 90.4
- P4
- 19.1
- 90.4
- P5
- 19.1
- 41.7
- A10
- P1
- 101.7
- 41.7
- P2
- 161.0
- 41.7
- P3
- 161.0
- 90.4
- P4
- 101.7
- 90.4
- P5
- 101.7
- 41.7
Dependencies are inferred from the claim text.