Scanning electron microscope

A scanning electron microscope comprising:

• a stage which can move a specimen;
• and
• a control device which moves said specimen to a second coordinate which is obtained by correcting a first coordinate value of objects on said specimen, wherein said first coordinate value was obtained by another device before an inspection by the scanning electron microscope, with a coordinate correcting expression;
• wherein
• said control device calculates a vector showing direction and distance between said second coordinate and a third coordinate at which the object was observed by the scanning electron microscope, and
• said scanning electron microscope further comprises a function which calculates a frequency of occurrence of an object or defect which is automatically detected at a designated magnification based on said determined magnification and object size information sent from said another device.

A scanning electron microscope comprising:

• a stage which can move a specimen;
• and
• a control device which moves said specimen to a second coordinate which is obtained by correcting a first coordinate value of objects on said specimen, wherein said first coordinate value was obtained by another device before an inspection by the scanning electron microscope, with a coordinate correcting expression;
• wherein
• said control device calculates a vector showing direction and distance between said second coordinate and a third coordinate at which the object was observed by the scanning electron microscope, and,
• said scanning electron microscope further comprises a function which calculates a throughput for measurement from the calculated frequency of occurrence, time required to detect a single object, and total number of the object.