Back to results
US 7,008,816 B2Granted
Imager photo diode capacitor structure with reduced process variation sensitivity
AssigneeMicron Technology, Inc.
InventorBrent A. McClure
Life of this patent
Estimating the term…
Abstract
A pixel cell having two capacitors connected in series where each capacitor has a capacitance approximating that of the periphery capacitors and such that the effective capacitance of the series capacitors is smaller than that of each of the periphery capacitors. The series-connected capacitors are coupled to the floating diffusion (FD) region for receiving “surplus” charge from the FD region during saturation conditions.
Claims10
A method of forming a pixel cell, comprising:
- providing a substrate with a photosensor formed therein;
- coupling a charge collection region to said photosensor;
- forming at least two storage capacitors coupled in series with each other,
- forming a contact between said series-connected capacitors and said charge collection region, such that said series-connected capacitors are connected in series with said charge collection region.
1 more element
A method of forming an integrated circuit, comprising:
- providing a semiconductor substrate having an array of pixel cells, wherein at least one of said pixel cells is formed by the steps of:
- providing a substrate having a photosensor coupled to a charge collection region;
- providing a material layer over said substrate;
- forming a conduit within said material layer;
- forming a contact within said conduit;
- coupling said contact with at least two storage capacitors coupled in series to each other, each of said series-connected capacitors formed by the steps of;
- providing a first electrode,
- providing a dielectric layer over said first electrode, and
- providing a second electrode over said dielectric layer,
- coupling one of said first electrodes of said series-connected capacitors to said contact;
- and
- forming signal processing circuitry within said substrate and coupling said circuitry to said array of pixels.
9 more elements
Dependencies are inferred from the claim text.