Optical device and method of manufacture thereof
AssigneeTriQuint Technology Holding Co.
InventorsLeonard Jan-Peter Ketelsen, Abdallah Ougazzaden, Justin L. Peticolas
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Abstract
The present invention provides an optical device and a method of manufacture thereof. In one embodiment, the method of manufacturing the optical device may include isolating an end of a first layer from a cladding layer located over a mesa structure that has been formed from a substrate. The end of the first layer may be isolated from the cladding layer by encapsulating the end between second and third layers located adjacent the mesa structure.
Claims18
A method of manufacturing an optical device, comprising:
- forming a mesa structure from said substrate, said mesa structure having a cladding layer located thereover;
- and
- isolating an end of a first layer from said cladding layer by encapsulating said end between second and third layers located adjacent said mesa structure, wherein said first layer comprises indium phosphide and said encapsulating includes forming said first layer having said isolated end in the presence phosphorous trichloride.
A method of manufacturing an optical device, comprising:
- forming a mesa structure from said substrate, said mesa structure having a cladding layer located thereover;
- and
- isolating an end of a first layer from said cladding layer by encapsulating said end between second and third layers located adjacent said mesa structure, wherein said second and third layers comprise indium phosphide and said encapsulating includes forming said second and third layers in an atmosphere substantially free of phosphorous trichioride.
A method of manufacturing an optical device, comprising:
- forming a mesa structure from said substrate, said mesa structure having a cladding layer located thereover;
- and
- isolating an end of a first layer from said cladding layer by encapsulating said end between second and third layers located adjacent said mesa structure, wherein said isolating includes forming said first layer in the presence of a compound containing chlorine or bromine.
Dependencies are inferred from the claim text.