Method and apparatus for joining substrates

A method of joining at least two substrates together, to form a data carrier, in a low-pressure chamber that has at least one opening for an introduction and/or removal of substrates, said method including the steps of:

• sealing off said at least one opening relative to surroundings;
• pumping out said low-pressure chamber;
• respectively sealing off said at least one opening of said low-pressure chamber (8) to form a transfer chamber between a first handling device disposed in said low-pressure chamber and a second handling device disposed externally of said low-pressure chamber, wherein said transfer chamber has a smaller volume than does said low-pressure chamber;
• transferring substrates in said transfer chamber from said second handling device to said first handling device, wherein prior to and/or during said substrate transfer said transfer chamber is pumped out to a pressure that is greater than a pressure in said low-pressure chamber;
• transporting substrates with said first handling device to an assembly station in said low-pressure chamber, wherein said low-pressure chamber is sealed off by said second handling device;
• bringing said first handling device into contact with said assembly station to form a joining chamber;
• pumping out said joining chamber to a pressure that is less than a pressure in said low-pressure chamber;
• and
• joining substrates together in said assembly station.