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US 7,008,481 B2Granted
Method and apparatus for depositing a homogeneous pyrolytic coating on substrates
AssigneeInnovative Thin Films, Ltd.
InventorsDean M. Giolando, Alan J. McMaster
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Abstract
A method and apparatus for depositing a homogeneous pyrolytic coating on substrates. These coatings would include insulator, metal and semiconductor films on a glass substrate. The apparatus controls the size and distribution of the spray droplets to improve the uniformity of the coatings.
Claims1
A coating apparatus for coating the surface of a substrate, comprising:
- a liquid atomizer;
- a mixing chamber for receiving atomized liquid;
- a mixing chamber outlet for collecting unused material;
- a restriction in communication with the mixing chamber wherein the opening in the restriction is smaller in area than the mixing chamber cross-section area;
- a diffuser in communication with the restriction wherein the discharge end of the diffuser is larger than the inlet end;
- and
- an exhaust duct adjacent the substrate and the discharge end of the diffuser.
4 more elements
Dependencies are inferred from the claim text.