Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface
AssigneeK.C. Tech Co., Ltd.
InventorsCheol-Nam Yoon, Se-Jong Ko
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AssigneeK.C. Tech Co., Ltd.
InventorsCheol-Nam Yoon, Se-Jong Ko
Estimating the term…
Disclosed is a nozzle for injecting sublimable solid particles, which is capable of minimizing consumption of the carrier gas and also maximizing cleaning efficiency. The nozzle comprises a base block having a space in which carrier gas is supplied through a gas supplying pipe; a sub-block having a space in which cleaning medium decompressed by a regulator is supplied through a cleaning medium supplying pipe; a first venturi block having a venturi path for adiabatically expanding the carrier gas supplied from the space of the base block, and a cleaning medium injection path communicating the venturi path and the space of the sub-block and the carrier gas passed through the venturi path; and a second venturi block having a venturi path for adiabatically expanding the mixed gas of the carrier gas and the cleaning medium.
A nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface, comprising:
Dependencies are inferred from the claim text.