Mass flow ratio system and method
AssigneeMKS Instruments, Inc.
InventorsJesse Ambrosina, Nicholas E. Kottenstette, Ali Shajii
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AssigneeMKS Instruments, Inc.
InventorsJesse Ambrosina, Nicholas E. Kottenstette, Ali Shajii
Estimating the term…
A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.
A system for dividing a single mass flow, from a system inlet into two or more secondary flows through two or more secondary flow lines in accordance with a preselected ratio of flow rates through the secondary flow lines, comprising:
A method of dividing a single mass flow into two or more secondary mass flows accordance with a preselected ratio, comprising:
A system for dividing a single mass flow provided at a system inlet into two or more secondary flows through two or more secondary flow lines in accordance with a desired ratio, comprising:
A method of dividing a single mass flow provided at a system inlet into two or more secondary flows through two or more secondary flow lines in accordance with a desired ratio, the system comprising:
Dependencies are inferred from the claim text.