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AssigneeToyoda Koki Kabushiki Kaisha
InventorsKiyotaka Kinoshita, Shiro Kuwahara, Toshiharu Mikami, Kaori Fujita, Toshitada Wada, Mitsuru Asai, Hiroaki Makino, Shin Tajima, Nobuo Kamiya, Katsunori Yamada
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A dynamic quantity sensor device capable of measuring a dynamic quantity at a high precision and securing insulation of a pressure sensing body easily. This dynamic quantity sensor includes a pressure sensing body composed of composite ceramics in which a material having a pressure resistance effect is dispersed on a matrix made of an electrical insulation ceramic material and a pressure receiving body having an electrical insulation characteristic and disposed on a pressure receiving surface of the pressure receiving body, wherein the pressure sensing body and the pressure receiving body are integrated with each other.
A dynamic quantity sensor device comprising:
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
Measuring force or stress, in general: using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies…
By piezoelectric pick-up: of the compression mode type
By piezoelectric pick-up: of the bending or flexing mode type
Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure
Term ended 9 Feb 2022 (estimated)
The present invention relates to the structure of a dynamic quantity sensor device for measuring a dynamic change rate in force, pressure, torque, velocity, acceleration, position, deflection, impact, weight, mass, degree of vacuum, turning moment, vibration, noise and the like.
Upon measuring a dynamic change rate in force, pressure, torque, velocity, acceleration, position, deflection, impact, weight, mass, degree of vacuum, turning moment, vibration, noise and the like through distortion (stress), generally, a dynamic quantity sensor device constructed using pressure resistance effect material has been widely used.
The pressure resistance effect refers to a phenomenon that electric resistance of material changes when compression stress, tensile stress, shearing stress, normal hydrostatic pressure stress is applied.
FIG. 1 is an explanatory diagram showing a dynamic quantity sensor device according to an embodiment 1.
FIG. 2 is a diagram showing the relation between a stress applied to the dynamic quantity sensor device and resistance change rate in a pressure sensing body according to the embodiment 1.
FIG. 3 is an explanatory diagram showing the structure of a load sensor device according to an embodiment 8.
According to a first aspect of the present invention, the aforementioned pressure receiving body is preferred to be an electric insulation ceramics. Particularly, as the pressure receiving body, the ones having following materials can be used as well as zirconia, which will be described later.
That is, it is permissible to employ Al2O3, MgAl2O4, SiO2, 3Al2O3, 2SiO2, Y2O3, CeO2, La2O3, Si3N4 and the like.
Further, it is necessary to provide the pressure sensing body with an electrode. As the electrode, it is permissible to use Ag, Au, Pt, Al, Ni, Cu and the like.