Method for machining glass substrate
AssigneesNational Institute of Advanced Industrial Science and Technology, Nippon Sheet Glass Co., Ltd.
InventorsKenji Kamada, Koji Ohta, Jun Yamaguchi, Tadashi Koyama
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Abstract
In the present invention, a surface 7 of a glass substrate 1 is irradiated with a laser beam 2 to thereby form a V-shaped groove 6. At that time, the laser beam 2 is condensed outside and above the glass substrate 1. The distance between a beam-condensing point 4 of the laser beam 2 and the surface 7 of the glass substrate 1 is changed to thereby make it possible to change the angle between opposite side surfaces of the V-shaped groove. The angle is in a range of from 30 degrees to 120 degrees. Further, the laser beam used in the present invention is pulsed light, preferably with a pulse width not larger than 10 picoseconds.
Claims12
A method for machining a glass substrate, comprising the step of:
- forming a V-shaped groove in a glass surface of a glass substrate, by irradiating said glass surface of said glass substrate to be machined with a laser beam from above said glass substrate in a state that said laser beam is condensed at a point outside of said glass substrate.
A method for machining a glass substrate, comprising the step of:
- forming concave portion in a glass surface of a glass substrate, by irradiating said glass surface of said glass substrate to be machined with a laser beam from above said glass substrate in a state that said laser beam is condensed at a point outside of said glass substrate;
- wherein the concave portion in the glass substrate has a conical hole shape.
A method of forming a V-shaped groove in a glass surface of a glass substrate, comprising:
- disposing the glass surface of the glass substrate below a beam-condensing point of a laser-beam;
- and
- irradiating said glass surface of said glass with said laser beam.
Dependencies are inferred from the claim text.