Method of making a magnetic head
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorJeffrey Scott Lille
Life of this patent
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Abstract
A narrow track width read sensor having a high magnetoresistive sensitivity is made using a self-aligned process which requires the use of only a single resist mask. A plurality of sensor layers is deposited over a substrate. After forming a resist mask in the central region, first lead layers are deposited in the end regions and over the resist mask. Using the resist mask, ion milling is performed such that the first lead layers and sensor layers in the end regions are substantially removed but sensor layers in the central region remain, to thereby form a read sensor having lead overlays on the edges thereof. Hard bias and second lead layers are then deposited in the end regions and over the resist mask. After the resist mask is removed, the top of the read sensor may be oxidized through an exposure to oxygen plasma.
Claims29
A method of making a magnetic head, comprising:
- depositing a plurality of sensor layers over a substrate;
- depositing a protective barrier layer over the plurality of sensor layers;
- forming a resist mask in a central region which is disposed between end regions;
- etching, with use of the resist mask, such that the protective barrier layer in the end regions are removed to thereby form a central protective barrier in the central region;
- depositing first lead layers in the end regions and over the resist mask in the central region;
- milling, with use of the resist mask, such that first lead layer materials and sensor layer materials in the end regions are substantially removed, but the sensor layers in the central region remain to thereby form a read sensor having lead overlays over edges thereof;
- depositing hard bias layers in the end region and over the resist mask in the central region;
- depositing second lead layers in the end regions and over the resist mask in the central region;
- and
- removing the resist mask from the central region.
A method of making a magnetic head, comprising:
- depositing a plurality of sensor layers over a substrate, wherein the sensor layers include a top noble metal layer;
- forming a resist mask in a central region which disposed between end regions;
- depositing first lead layers in the end regions and over the resist mask in the central region;
- milling, with use of the resist mask, such that first lead layer materials and sensor layer materials in the end regions are substantially removed, but the sensor layers in the central region remain to thereby form a read sensor having lead overlays over edges thereof;
- depositing hard bias layers in the end region and over the resist mask in the central region;
- depositing second lead layers in the end regions and over the resist mask in the central region;
- and
- removing the resist mask from the central region.
Dependencies are inferred from the claim text.