Method for making high speed, high areal density inductive write structure

A method for constructing an inductive write structure for use in a magnetic data recording system, comprising:

• forming a first magnetic pole of a magnetic material;
• depositing a first insulation layer;
• depositing a layer of dielectric write gap material;
• forming an electrically conductive coil;
• depositing a second insulation layer;
• curing said second insulation layer;
• forming a thin layer of high magnetic moment material, by sputter depositing a lamina of FeXN, X being selected from the group of materials consisting of Rh, Ta, Al, Ti, and Zr, and sputter depositing a lamina of a cobalt based ferromagnetic amorphous alloy;
• masking the thin layer of high magnetic moment material in a pattern corresponding to a second pole;
• plating a magnetic material in the pattern of said second pole;
• performing a first ion milling process, to remove at least a portion of the sputtered, high magnetic moment material not covered by the plated second pole;
• after forming the first magnetic pole:
• forming a layer of a high magnetic moment material onto said first pole;
• masking the high magnetic moment material formed onto the first pole in a pattern corresponding to a pedestal to be formed on an end of the first pole;
• and
• etching to remove said sputter deposited high magnetic moment material not covered by said mask to form said pedestal;
• depositing the mask at an end of said second pole;
• performing a second ion milling process to remove a portion of said second pole at said end;
• performing a reactive ion etching process to remove a portion of said dielectric write gap material layer;
• and
• performing a third ion milling process to remove a material from said pedestal.