Probe cartridge assembly and multi-probe assembly
AssigneeTokyo Electron Limited
InventorsSteven T. Fink, Thomas H. Windhorn
Life of this patent
Estimating the term…
Loading patent…
AssigneeTokyo Electron Limited
InventorsSteven T. Fink, Thomas H. Windhorn
Estimating the term…
A probe cartridge assembly and a multi-probe assembly (10) including a mounting plate having a plurality of the probe cartridge assemblies mounted on the mounting plate. The probe cartridge assembly generally includes a mounting member, a probe insulator (30), a probe (40), a ferrule (50), a lead insulator (60), a retaining member (70), and a wire having an electrical lead. The electrical lead is positioned within a cavity in the ferrule, and an inclined surface of the ferrule is contacted to an inclined surface of the probe within an area defined by the probe insulator and the lead insulator. The probe insulator and the lead insulator are held within an area defined by the mounting member and the retaining member. The retaining member and the mounting member are adjustably mated to each other in order to provide a clamping force to ensure proper electrical interconnection between the electric lead, the ferrule, and the probe.
A probe cartridge assembly comprising:
A multi-probe assembly comprising a mounting plate having a plurality of mounting holes and a plurality of probe cartridge assemblies mounted in a corresponding one of said plurality of mounting holes, wherein at least one probe cartridge assembly of said probe cartridge assemblies comprises:
A probe cartridge assembly comprising:
Dependencies are inferred from the claim text.