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US 7,005,391 B2Granted
Method of manufacturing inorganic nanotube
AssigneeSamsung Electronics Co., Ltd.
InventorsYo-sep Min, Eun-ju Bae, Won-bong Choi, Young-jin Cho, Jung-hyun Lee
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Abstract
A method of manufacturing an inorganic nanotube using a carbon nanotube (CNT) as a template, includes preparing a template on which a CNT or a CNT array is formed, forming an inorganic thin film on the CNT by depositing an inorganic material on the template using atomic layer deposition (ALD), and removing the CNT to obtain an inorganic nanotube or an inorganic nanotube array, respectively.
Claims11
A method of manufacturing an inorganic nanotube, comprising:
- preparing a template on which a carbon nanotube (CNT) or a CNT array is formed;
- forming a ruthenium (Ru) thin film on the CNT by depositing ruthenium on the template using atomic layer deposition (ALD) at a temperature below 300° C.;
- and
- removing the CNT to obtain a ruthenium nanotube or ruthenium nanotube array.
1 more element
Dependencies are inferred from the claim text.