Processes for fabricating conductive patterns using nanolithography as a patterning tool
AssigneeNanoInk, Inc.
InventorsPercy Vandorn Crocker, Jr., Linette Demers, Nabil A. Amro
Life of this patent
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Abstract
Nanolithographic deposition of metallic nanostructures using coated tips for use in microelectronics, catalysis, and diagnostics. AFM tips can be coated with metallic precursors and the precursors patterned on substrates. The patterned precursors can be converted to the metallic state with application of heat. High resolution and excellent alignment can be achieved.
Claims54
A method of depositing a conductive coating in a desired pattern onto a substrate comprising:
- depositing a precursor onto the substrate in the desired pattern by nanolithography with use of a tip coated with the precursor,
- contacting the precursor with a ligand,
- applying sufficient energy to transfer electrons from the ligand to the precursor, thereby decomposing the precursor to form a conductive precipitate in the desired pattern and thus forming the conductive pattern directly on the substrate.
A method of printing a conductive metal in a desired pattern onto a substrate comprising:
- drawing a metal precursor and ligand directly onto the substrate according to the desired pattern using nanolithography with use of a tip coated with a precursor;
- and
- decomposing the precursor by applying energy to form the conductive metal in the desired pattern, without removing from the substrate a substantial quantity of the precursor, and without removing from the substrate a substantial quantity of the metal.
A nanolithographic method comprising:
- depositing a metallic precursor from a tip onto a substrate to form a nanostructure, and
- subsequently converting the precursor nanostructure to a metallic deposit.
A nanolithographic method consisting essentially of:
- depositing an ink composition consisting essentially of a metallic precursor from a nanoscopic tip onto a substrate to form a nanostructure, and
- subsequently converting the metallic precursor of the nanostructure to a metallic form.
A method of printing without use of electrochemical bias or reaction between the ink and substrate comprising depositing a metallic precursor ink composition onto a substrate from a tip in the form of a microstructure or nanostructure on the substrate to form an array having discreet objects separated from each other by about one micron or less.
Dependencies are inferred from the claim text.