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US 7,004,827 B1Granted
Method and apparatus for polishing a workpiece
AssigneeKomag, Inc.
InventorsShoji Suzuki, Koji Adachi, Richard Shigetoshi Mori
Life of this patent
Estimating the term…
Abstract
A carrier has openings for holding workpieces during polishing. Upper and lower polishing pads push against upper and lower surfaces of the workpieces, respectively. A ring is provided within the openings. This ring surrounds the workpieces, and prevents or reduces roll-off.
Claims24
Structure comprising:
- a generally planar workpiece carrier comprising at least one opening for holding a generally disk-shaped workpiece;
- and
- a ring movably placed within said at least one opening, said ring having a top surface, a bottom surface, and a discontinuity extending from said top surface through said bottom surface for adjusting the diameter of said ring.
A combination of a workpiece and apparatus, wherein said workpiece has an opening therein and said apparatus comprises:
- a generally planar workpiece carrier comprising at least one opening for holding said workpiece;
- a member inserted into said opening of said workpiece;
- and
- at least one polishing pad for polishing at least one surface of said workpiece, said polishing pad extending over said workpiece, said opening of said workpiece and said member, and wherein said member prevents or reduces roll-off in said workpiece near the opening of said workpiece when said workpiece is being polished by said polishing pad.
1 more element
A combination of a workpiece and apparatus, wherein said workpiece has an opening therein and said apparatus comprises:
- a generally planar workpiece carrier comprising at least one opening for holding said workpiece;
- a member inserted into said opening of said workpiece;
- and
- at least one polishing pad for polishing at least one surface of said workpiece, said pad extending over said opening of said workpiece, said workpiece and said member,
- wherein said member prevents or reduces roll-off near the opening of said workpiece.
2 more elements
Method comprising:
- providing a structure comprising a generally planar workpiece carrier comprising at least one opening:
- providing a ring within said at least one opening, said ring having a top surface, a bottom surface and a discontinuity extending from said top surface through said bottom surface for adjusting the diameter of said ring;
- placing a generally disk-shaped workpiece within said ring, said workpiece being rotatable within said opening;
- and
- polishing said workpiece by applying at least one polishing pad surface against said workpiece.
2 more elements
Method comprising:
- providing a structure comprising a generally planar workpiece carrier comprising at least one opening;
- placing a generally disk-shaped workpiece within said opening of said carrier, said workpiece having an opening therein;
- providing a member within said opening of said workpiece;
- and
- polishing said workpiece by applying at least one polishing pad against said workpiece, wherein said workpiece carrier, member and polishing pad act as at least a portion of polishing apparatus, said polishing pad extending over said workpiece, said opening of said workpiece and said member during at least part of said act of polishing, and wherein said member prevents or reduces roll-off in said workpiece near the opening of said workpiece when said workpiece is being polished by said polishing pad.
2 more elements
Method comprising:
- providing a structure comprising a generally planar workpiece carrier comprising at least one opening;
- placing a generally disk-shaped workpiece within said opening of said carrier, said workpiece having an opening therein;
- providing a member within said opening of said workpiece;
- and
- polishing said workpiece by applying at least one polishing pad against said workpiece, wherein said workpiece carrier, member and polishing pad act as at least a portion of polishing apparatus, wherein said member prevents or reduces roll-off of said workpiece near said opening of said workpiece, said pad extending over said opening of said workpiece, said workpiece and said member.
2 more elements
Structure comprising:
- a generally planar workpiece carrier comprising at least one opening for holding a generally disk-shaped workpiece;
- and
- a ring movably placed within said at least one opening, said ring having a break therein, wherein the material of said ring on one side of said break is not rigidly affixed to the material of said ring on the other side of said break, wherein said workpiece is rotatable with respect to said opening.
Method comprising:
- providing a structure comprising a generally planar workpiece carrier comprising at least one opening:
- providing a ring within said at least one opening, said ring having a break therein;
- placing a generally disk-shaped workpiece within said ring;
- and
- polishing said workpiece by applying at least one polishing pad surface against said workpiece, wherein material of said ring on one side of said break is not rigidly affixed to the material of said ring on the other side of said break, wherein said workpiece is rotatable with respect to said opening.
2 more elements
Dependencies are inferred from the claim text.