Equipment management method
AssigneeNational Science Council
InventorsFan-Tien Cheng, Chun-Yen Teng
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AssigneeNational Science Council
InventorsFan-Tien Cheng, Chun-Yen Teng
Estimating the term…
An equipment management method for managing semiconductor equipment via an equipment manager. In the equipment management method, production scenario rules and equipment behavior rules are first defined respectively in a production scenario database of a configuration controller and an equipment behavior database of an equipment driver. Them, a command is received from a manufacturing execution system (MES), and is converted into a production process scenario by looking up the corresponding production scenario rule in the production scenario database. Thereafter, the production process scenario is converted into a GEI (generic equipment interface) message with a GEI message specification, and the GEI message is transmitted to the equipment driver. Then, the GEI message is converted into equipment communication messages regulated by an equipment communication protocol by looking up the corresponding equipment behavior rule in the equipment behavior database. Then, the equipment communication messages are transmitted to equipment.
An equipment management method for managing at least one piece of equipment through an equipment manager, said equipment manager including a configuration controller, an equipment driver and a generic equipment interface (GEI) having a GEI message specification used as a communication standard between said configuration controller and said equipment driver, said equipment management method comprising:
Dependencies are inferred from the claim text.