Mirror device, optical switch, thin film elastic structure, and thin elastic structure producing method

A thin-film elastic structural body comprising:

• a plurality of plate spring parts constructed from thin films having one or more layers, and in which the plurality of plate spring parts are mechanically connected so that a single elastic body is formed,
• one end portion of at least one of the plurality of plate spring parts being mechanically connected to a substrate via a leg part which has a rising part that extends from the substrate,
• an other end portion of the at least one plate spring part being mechanically connected to one end portion of at least one other plate spring part via a connecting part which extends from the other end portion of the at least one plate spring part,
• the other end portion of the at least one plate spring part being bent away from the substrate, and
• the one end of the at least one other plate spring part being bent toward the substrate,
• wherein the at least one other plate spring part extends in a direction away from the mechanical connection of the one end of the at least one plate spring part to the substrate,
• wherein at least one plate spring part among the plurality of plate spring parts is deformed by a driving signal, and
• wherein the at least one plate spring part is bent away from the substrate when the driving signal is not supplied thereto.