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US 7,002,727 B2Granted
Optical materials in packaging micromirror devices
AssigneeReflectivity, INC
InventorAndrew G. Huibers
Life of this patent
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Abstract
A method for packaging micromirror array devices is disclosed herein. The method enhances illumination on micromirror array devices by applying a selected optical material between a package lid and glass substrate of the micromirror array device, the selected optical material having a refraction index that matches the refraction indices of the package lid and the glass substrate.
Claims25
A device, comprising:
- a package with a first substrate that is transmissive to ultra-violet or visible light;
- a micromirror array device placed within the package, wherein the micromirror array device further comprises a second substrate that is transmissive to visible light;
- and
- a light-transmissive optical material that fills the space between and in contact with the first and second substrates, wherein the optical material is in liquid or solid state.
1 more element
A method, comprising:
- providing a micromirror array device that comprises a glass substrate and a number of micromirrors;
- attaching the micromirror array device to a packaging substrate of a package;
- providing a packaging lid;
- filling a light-transmissive optical material in the space between the glass substrate of the micromirror array device and the packaging lid, wherein the optical material is in liquid or solid state;
- and
- bonding the packaging lid and the packaging substrate.
3 more elements
Dependencies are inferred from the claim text.