Mirror for an integrated device
AssigneeLucent Technologies Inc.
InventorAlex T. Tran
Life of this patent
Estimating the term…
Abstract
A mirror for an optical MEMS device has a plurality of segments supported on a substrate layer. Each segment includes a support post, a support layer, and a reflective layer formed over the support layer. The reflective layers of the plurality of segments form the reflective surface of the mirror. Due to the relatively small lateral dimensions of the segments, the mirror has a smaller thermal bow than prior art mirrors. The bow can be controlled, e.g., by appropriately choosing the number of segments and the layer thicknesses.
Claims18
A mirror for an integrated device, comprising:
- a substrate layer and a plurality of segments mounted on the substrate layer, wherein each segment includes:
- (i) a reflective layer formed over a support layer;
- and
- (ii) a support post attached between the substrate layer and the support layer, wherein the mirror is part of a MEMS device in which the mirror is adapted to move relative to the rest of the MEMS device in response to an applied actuator voltage.
An integrated device, comprising a mirror, wherein:
- the mirror includes a substrate layer and a plurality of segments mounted on the substrate layer;
- each segment includes:
- (i) a reflective layer formed over a support layer;
- and
- (ii) a support post attached between the substrate layer and the support layer;
- and
- the device is a MEMS device in which the mirror is adapted to move relative to the rest of the MEMS device in response to an applied actuator voltage.
A method of fabricating a mirror for an integrated device, comprising:
- forming a plurality of segments on a substrate layer, wherein:
- the mirror includes the substrate layer and the plurality of segments;
- each segment includes:
- (i) a reflective layer formed over a support layer;
- and
- (ii) a support post attached between the substrate layer and the support layer;
- and
- the device is a MEMS device in which the mirror is adapted to move relative to the rest of the MEMS device in response to an applied actuator voltage.
A mirror for an integrated device, comprising:
- a plurality of segments mounted on a substrate layer, wherein each segment includes:
- (i) a reflective layer formed over a support layer;
- and
- (ii) a support post attached between the substrate layer and the support layer,
- wherein:
- the reflective layer is a metal layer;
- the substrate and support layers comprise silicon;
- and
- the support post comprises silicon dioxide.
Dependencies are inferred from the claim text.